Hydrogen loss and its improved retention in hydrogen plasma treated a-SiN :H films: ERDA study with 100 MeV Ag7+ ions

Author:

Bommali R.K.,Ghosh S.,Khan S.A.,Srivastava P.

Funder

IAEA

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference36 articles.

1. Influence of PECVD deposited SiNx passivation layer thickness on In0.18Al0.82N/GaN/Si HEMT;Singh;J. Phys. D: Appl. Phys.,2015

2. Electroluminescence from Er-doped Si-rich silicon nitride light emitting diodes;Yerci;Appl. Phys. Lett.,2010

3. Characterisation and optimisation of PECVD SiNx as an antireflection coating and passivation layer for silicon solar cells;Wan;AIP Adv.,2013

4. Broadband antireflection sub-wavelength structure of InGaP/InGaAs/Ge triple junction solar cell with composition-graded SiNx;Chung;Mater. Res. Exp.,2015

5. Surface passivation of crystalline silicon wafer via hydrogen plasma pre-treatment for solar cells;Kim;Sol. Energ. Mat. Sol. C,2011

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