Controlled oxidation state of silver oxide thin films deposited by an integrated anode layer ion source ion beam sputter module
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference21 articles.
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3. Preparation of Sn-doped In2O3 (ITO) films at low deposition temperatures by ion-beam sputtering;Fan;Appl. Phys. Lett.,1979
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