Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography-Reference-Cited by-同舟云学术

Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography

Published:2012-02 Issue: Volume:272 Page:149-152
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Puttaraksa Nitipon,Unai Somrit,Rhodes Michael W.,Singkarat Kanda,Whitlow Harry J.,Singkarat Somsorn

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

2. Handbook of Semiconductor Manufacturing Technology;Rizvi,2008

3. Fundamentals of Ion-Irradiated Polymers,2004

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