Multi-scale modeling of localized heating caused by ion bombardment-Reference-Cited by-同舟云学术

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Multi-scale modeling of localized heating caused by ion bombardment

Published:2012-02 Issue: Volume:272 Page:165-168
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Myers Michael T.,Sencer Bulent H.,Shao Lin

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. Applications of focused ion beam microscopy to materials science specimens

2. Damage in III–V Compounds during Focused Ion Beam Milling

3. Ion-Solid Interactions;Nastasi,1996

4. FIB-induced damage in silicon

5. Fundamentals of Radiation Materials Science;Was,2007

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4. Focused particle beam nano-machining: the next evolution step towards simulation aided process prediction;Nanotechnology;2015-01-12

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