Iron distribution in the implanted silicon under the action of high-power pulsed ion and laser beams
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
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2. Features of the pulsed treatment of silicon layers implanted with erbium ions;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2009-08
3. THE MORPHOLOGY AND OPTICAL PROPERTIES OF Fe, Cr AND Mg SILICIDE NANOCRYSTALLITES BURIED IN SILICON BY ION IMPLANTATION, PULSED TREATMENTS AND Si OVERGROWTH;Physics, Chemistry and Application of Nanostructures;2009-04
4. Epitaxial growth of silicon on silicon implanted with iron ions and optical properties of resulting structures;Technical Physics;2008-02
5. Structural and optical properties of Si/β-FeSi 2 /Si heterostructures fabricated by Fe ion implantation and Si MBE;SPIE Proceedings;2007-09-13
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