Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures-Reference-Cited by-同舟云学术

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Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures

Published:2009-07 Issue:14 Volume:267 Page:2376-2380
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Yue Weisheng,Ren Yaping,van Kan Jeroen Anton,Chiam Sher-Yi,Jian Linke,Moser Herbert O.,Osipowicz Thomas,Watt Frank

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference20 articles.

1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

2. High Aspect Ratio Vertical Cantilever RF-MEMS Variable Capacitor

3. Periodic nanostructures for photonics

4. E-beam lithography and electrodeposition fabrication of thick nanostructured devices

5. High-resolution x-ray masks for high aspect ratio microelectromechanical systems applications

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancing proton beam writing system with auto scanning software and stage movement;Microelectronic Engineering;2013-02

2. 3D THz metamaterials from micro/nanomanufacturing;Laser & Photonics Reviews;2011-09-19

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