Automation and optimization of stopping and range of ions in matter simulation runtime
Author:
Funder
US Department of Energy
Sandia National Laboratories
Laboratory Directed Research and Development
National Nuclear Security Administration
Publisher
Elsevier BV
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3. Hooghan, K.B.N., Device Edits and Modifications, in Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice, L.A. Giannuzzi and F.A. Stevie, Editors. 2005, Springer US: Boston, MA. p. 87-106.
4. High-yield deterministic focused ion beam implantation of quantum defects enabled by in situ photoluminescence feedback;Chandrasekaran;Adv. Sci.,2023
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