Effect of electric charge accumulation on low energy ion implantation in insulators
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Low Energy Ion–Surface Interactions,1994
2. Radiation effects under multiply charged ion impacts
3. Depth distribution of 0.4–1.6 keV deuterium ions implanted into polystyrene and hydrogenated carbon
4. Effect of electric charge accumulation on insulators during low energy ion implantation
5. Depth-profiling of hydrogen and helium isotopes by means of the ERD E × B technique
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