Surface erosion induced by heavy ion backscattering analysis-Reference-Cited by-同舟云学术

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Surface erosion induced by heavy ion backscattering analysis

Published:2011-12 Issue:24 Volume:269 Page:3057-3059
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Döbeli M.,Mallepell M.,Müller A.M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

1. Handbook of Modern Ion Beam Materials Analysis;Tesmer,1995

2. Limits in elastic recoil detection analysis with heavy ions

3. Fundamentals of Surface and Thin Film Analysis;Feldman,1986

4. The Stopping and Range of Ions in Solids;Ziegler,1985

5. Using heavy ion backscattering spectrometry (HIBS) to solve integrated circuit manufacturing problems

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