Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
1. Handbook of Plasma Immersion Ion Implantation and Deposition,2000
2. Methane plasma source ion implantation (PSII) for improvement of tribological and corrosion properties
3. Recent advances in plasma source ion implantation at Los Alamos National Laboratory
4. Diamondlike carbon deposition on silicon using radio-frequency inductive plasma of Ar and C2H2 gas mixture in plasma immersion ion deposition
5. High dose nitrogen and carbon shallow implantation in Si by plasma immersion ion implantation
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1. Characterization of diamond-like carbon films prepared using various source gases by plasma-based ion implantation and deposition;Surface and Coatings Technology;2018-12
2. Conductive diamond-like carbon films prepared by high power pulsed magnetron sputtering with bipolar type plasma based ion implantation system;Diamond and Related Materials;2017-08
3. Nitrogen implantation into diamond-like carbon films prepared by bipolar-type plasma based ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
4. Effects of electrical conductivity of substrate materials on microstructure of diamond-like carbon films prepared by bipolar-type plasma based ion implantation;Journal of Physics: Conference Series;2013-03-01
5. Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation;Surface and Coatings Technology;2009-06
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