Author:
Sakai W.,Nakajima K.,Suzuki M.,Kimura K.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
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1. Depth resolution enhancement by combined DSIMS and TOF-LEIS profiling;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-02
2. Characterization of interface of Al–Ni/a-Si for thin film transistor using high-resolution Rutherford backscattering spectrometry;Micron;2009-01
3. Observation of the interfacial layer in HfO2(10nm)/Si by high-resolution RBS in combination with grazing angle sputtering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
4. Light-ion beam for microelectronic applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-10