Proton beam fabrication of nickel stamps for nanoimprint lithography-Reference-Cited by-同舟云学术

Proton beam fabrication of nickel stamps for nanoimprint lithography

Published:2005-04 Issue:1-4 Volume:231 Page:407-412
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Ansari K.,Shao P.G.,van Kan J.A.,Bettiol A.A.,Watt F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference17 articles.

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5. M.T. Li, PhD Thesis Princeton University, Princeton, 2003

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