Usage of Additive for the Improvement of the Filling Effect during Filling the Grating Structure of the Nanoimprint Stamp
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Published:2018
Issue:9
Volume:47
Page:905001
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ISSN:1004-4213
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Container-title:ACTA PHOTONICA SINICA
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language:en
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Short-container-title:光子学报
Author:
ZHENG Yong-guang 郑永广,ZHANG Ran 张然,LIU Ze 刘泽,CHU Jin-kui 褚金奎
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics