An instrument for direct measurements of sputtering related momentum transfer to targets
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
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1. Directionally resolved measurements of momentum transport in sputter plumes as a critical test for simulations;J VAC SCI TECHNOL A;2020
2. An interferometric force probe for beam diagnostics and the study of sputtering;EPJ Techniques and Instrumentation;2018-03-21
3. Measurement and simulation of forces generated when a surface is sputtered;Physics of Plasmas;2017-09
4. Measurement and simulation of the momentum transferred to a surface by deposition of sputtered atoms*;The European Physical Journal D;2016-12
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