Investigation of the drastic change in the sputter rate of polymers at low ion fluence
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference24 articles.
1. Oxygen plasma removal of thin polymer films
2. Dry Etch Resistance of Organic Materials
3. Enhancement of Dry-Etching Durabilities by Energy or Etchant Quenching
4. Collision Cascade and Sputtering Process in a Polymer
5. Understanding collision cascades in molecular solids
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