Nickel silicide formation on shallow junctions
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
1. Refractory silicides for integrated circuits
2. Silicides and ohmic contacts
3. Self-aligned nickel-mono-silicide technology for high-speed deep submicrometer logic CMOS ULSI
4. Materials aspects, electrical performance, and scalability of Ni silicide towards sub-0.13 μm technologies
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