Deep ultra violet and visible Raman spectroscopy studies of ion implanted 6H-SiC: Recrytallisation behaviour and thermal decomposition/thermal etching of the near surface region-Reference-Cited by-同舟云学术

Deep ultra violet and visible Raman spectroscopy studies of ion implanted 6H-SiC: Recrytallisation behaviour and thermal decomposition/thermal etching of the near surface region

Published:2015-12 Issue: Volume:365 Page:342-346
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Kuhudzai R.J.,Malherbe J.B.,van der Berg N.G.,Hlatshwayo T.T.,Odutemowo O.,Prinsloo L.C.,Buys A.V.,Erasmus R.,Wendler E.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference24 articles.

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5. Annealing of silver implanted 6H–SiC and the diffusion of the silver

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