Nanoparticle formation in 25-nm-SiO2 thin layer by germanium negative-ion implantation and its capacitance–voltage characteristics-Reference-Cited by-同舟云学术

Nanoparticle formation in 25-nm-SiO2 thin layer by germanium negative-ion implantation and its capacitance–voltage characteristics

Published:2007-04 Issue:1-2 Volume:257 Page:94-98
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Tsuji Hiroshi,Arai Nobutoshi,Gotoh Naoyuki,Minotani Takashi,Kojima Kenji,Adachi Kouichiro,Kotaki Hiroshi,Ishibashi Toyotsugu,Gotoh Yasuhito,Ishikawa Junzo

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

1. Room-temperature single-electron memory

2. Silver nanoparticle formation in thin oxide layer on silicon by silver-negative-ion implantation for Coulomb blockade at room temperature

3. Single electron charging of Sn nanocrystals in thin SiO/sub 2/ film formed by low energy ion implantation

4. Nonlinear optical properties of Cu nanoparticle composites fabricated by 60 keV negative ion implantation

5. Interfaces under ion irradiation: growth and taming of nanostructures

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evidence for the Formation of a Local Pre-Existing Surface Band-Gap Electronic State by F^– Projectile Grazing Scattering from a LiF(001) Surface;The Journal of Physical Chemistry C;2022-11-07

2. 150 KeV Cu− ion- implantation in SrVO3 thin films: A study of Cu induced defect states;Vacuum;2020-11

3. Ion beam induced surface and interface engineering;Surface Science Reports;2011-03

4. Surface modification by negative-ion implantation;Surface and Coatings Technology;2009-06

5. Spectroscopic ellipsometric study of Ge nanocrystals embedded in SiO2 using parametric models;physica status solidi (c);2008-05