Layer morphology analysis of sputter-eroded silicon gratings using Rutherford backscattering-Reference-Cited by-同舟云学术

Layer morphology analysis of sputter-eroded silicon gratings using Rutherford backscattering

Published:2011-08 Issue:16 Volume:269 Page:1811-1817
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Langhuth Hagen,Mayer Matej,Lindig Stefan

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

1. Handbook of Modern Ion Beam Materials Analysis;Tesmer,1995

2. Handbook of Modern Ion Beam Materials Analysis;Wang,2009

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