A 2-dimensional RBS simulation program for studying the edges of multilayer integrated circuit components-Reference-Cited by-同舟云学术

A 2-dimensional RBS simulation program for studying the edges of multilayer integrated circuit components

Published:1990-01 Issue:1-4 Volume:45 Page:157-159
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Guo X.S.,Lanford W.A.,Rodbell K.P.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference4 articles.

1. RUMP RBS Simulation Program;Doolittle,1985

2. VLSI Technology;Sze,1983

3. these Proceedings Ninth Int. Conf. on Ion Beam Analysis;Guo,1990

4. Backscattering Spectrometry;Chu,1978

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