Depth resolution optimization for low-energy ERDA

Author:

Giangrandi S.,Arstila K.,Brijs B.,Sajavaara T.,Vantomme A.,Vandervorst W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Installation of TOF-E telescope ERDA in UTTAC at the University of Tsukuba: Analysis of metal-nitride-based multi-layer coatings on glasses;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2021-09

2. Surface analysis and depth profiling using time-of-flight elastic recoil detection analysis with argon sputtering;Scientific Reports;2018-07-10

3. Conceptual study of a heavy-ion-ERDA spectrometer for energies below 6 MeV;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09

4. Secondary electron flight times and tracks in the carbon foil time pick-up detector;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-10

5. Compositional depth profiling of TaCN thin films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-07

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