Author:
Brijs B.,Sajavaara T.,Giangrandi S.,Arstila K.,Vantomme A.,Vandervorst W.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2008-12
2. Depth resolution optimization for low-energy ERDA;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-08
3. Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08