Ion transmission through nano-apertures

Author:

Taylor M.L.,Franich R.D.,Alves A.,Reichart P.,Jamieson D.N.,Johnston P.N.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Investigation of Ion Channeling and Scattering for Single‐Ion Implantation with High Spatial Resolution;physica status solidi (a);2019-10-07

2. Aperture edge scattering in focused MeV ion beam lithography and nuclear microscopy: An application for the GEANT4 toolkit;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-06

3. Aperture-edge scattering in MeV ion-beam lithography. II. Scattering from a rectangular aperture;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009

4. Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009

5. Scanning Transmission Ion Microscopy of Nanoscale Apertures;Journal of the Korean Physical Society;2008-12-15

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