Fabrication of curved PDMS microstructures on silica glass by proton beam writing aimed for micro-lens arrays on transparent substrates
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference23 articles.
1. Proton beam writing
2. Micro-machining of resists on silicon by proton beam writing
3. Fabrication of three-dimensional structures of resist by proton beam writing
4. Tunable microfluidic microlenses
5. On-chip optical components and microfluidic systems
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1. Proton Beam Writing Fabrication of Micro-Patterns in Dielectric Films for Improving Output Voltage Triboelectric Nanogenerators;2023 International Symposium on Electrical Insulating Materials (ISEIM);2023-09-24
2. Partially coherent beam smoothing using a microlens array;Optics Express;2021-12-16
3. Refractive index change and thermo-optic effect in polydimethylsiloxane nanocomposites with oxide nanoparticles induced by proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-11
4. Laser Space Shaping Based on Beam Integration;Laser & Optoelectronics Progress;2019
5. Electric-Field-Assisted Single-Step In Situ Fabrication and Focal Length Control of Polymeric Convex Lens on Flexible Substrate;Advanced Materials Technologies;2018-07-13
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