Controlled oxidation of mono-Si and Si3N4 under irradiation of composite ion beams at room temperature
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Fabrication of metal nanowires by ion-beam irradiation of oxides through high aspect ratio resist masks;Gurovich;J. Vac. Sci. Technol., B,2011
2. Magnetic properties of high-density patterned magnetic media;Gurovich;J. Magn. Magn. Mater.,2010
3. Potential barrier formation at a metal-semiconductor contact using selective removal of atoms;Gurovich;Semiconductors,2004
4. Physical mechanisms underlying the selective removal of atoms;Gurovich;Physics-Uspekhi,2009
5. Mechanics of smart-cut technology;Feng;Int. J. Solids Struct.,2004
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Characterization of Si3N4/Si(111) thin films by reflectance difference spectroscopy;Japanese Journal of Applied Physics;2015-01-14
2. Microstructure evolution during silicon oxidation at room temperature under composite ion beam irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-05
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