Decaborane implantation with the medium current implanter-Reference-Cited by-同舟云学术

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Decaborane implantation with the medium current implanter

Published:2005-08 Issue:1-2 Volume:237 Page:443-448
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hamamoto Nariaki,Umisedo Sei,Nagayama Tsutomu,Tanjyo Masayasu,Sakai Shigeki,Nagai Nobuo,Aoyama Takayuki,Nara Yasuo

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

1. K. Goto, J. Matsuo, T. Sugii, H. Minakata, I. Yamada, T. Hisatsugu, International Electron Device Meeting – 1996, IEEE, p. 17.1.1.

2. 17th International Conference on the Application of Accelerators in Research and Industry, CAARI 2002;Nagai,2003

3. Extended Abstracts of the Fourth International Workshop on Junction Technology;Umisedo,2004

4. Proceedings of 2000 International Conference on Ion Implantation Technology;Nagai,2000

5. Proceedings of 1998 International Conference on Ion Implantation Technology;Perel,1999

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molecular dynamics simulations of cluster impacts on solid targets: implantation, surface modification, and sputtering;Journal of Computational Electronics;2013-09-12

2. Activation of As Atoms in Ultrashallow Junction during Milli- and Microsecond Annealing Induced by Thermal-Plasma-Jet Irradiation;Japanese Journal of Applied Physics;2011-04-20

3. Activation of As Atoms in Ultrashallow Junction during Milli- and Microsecond Annealing Induced by Thermal-Plasma-Jet Irradiation;Japanese Journal of Applied Physics;2011-04-01

4. Activation of B and As in Ultrashallow Junction During Millisecond Annealing Induced by Thermal Plasma Jet Irradiation;Japanese Journal of Applied Physics;2010-04-20

5. A Modeling for the Interaction between a Cluster Beam and Material;Hyomen Kagaku;2010

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