Microwave-induced low-temperature crystallization of amorphous Si thin films
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Materials Science
Reference11 articles.
1. High quality polysilicon by amorphous low pressure chemical vapor deposition
2. Low-Temperature Crystallization of Amorphous Si Films by Metal Adsorption and Diffusion
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4. Recrystallization of LPCVD amorphous Si films using F+ implantation
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