High quality polysilicon by amorphous low pressure chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93904
Reference2 articles.
1. Structure and Properties of LPCVD Silicon Films
2. Measurement of the correlation between the specular reflectance and surface roughness of Ag films
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