Introducing pinhole magnification by selective etching: application to poly-Si on ultra-thin silicon oxide films

Author:

Tetzlaff Dominic,Dzinnik Marvin,Krügener Jan,Larionova Yevgeniya,Reiter Sina,Turcu Mircea,Peibst Robby,Höhne Uwe,Kähler Jan-Dirk,Wietler Tobias F.

Publisher

Elsevier BV

Reference22 articles.

1. Ion Implantation for Poly-Si Passivated Back-Junction Back-Contacted Solar Cells;Römer;IEEE J. Photovolt.,2015

2. Larionova Y, Peibst R, Turcu M, Reiter S, Brendel R, Tetzlaff D, Krügener J, Wietler T, Höhne U, Kähler JD. Optimization of p+ poly-Si / c-Si junctions on wet-chemically grown interfacial oxides and on different wafer morphologies. 32nd EU PVSEC 2016, Munich, Germany.

3. Richter A, Benick J, Feldmann F, Fell A, Hermle M, Glunz SW. Silicon solar cells with full-area passivated rear contact: Influence of base resistivity on device performance on a 25% efficiency level. 26th International PVSEC 2016, Singapore.

4. Haase F, Kiefer F, Krügener J, Brendel R, Peibst R. IBC solar cells with polycrystalline on oxide (POLO) passivating contacts for both polarities. 26th International PVSEC 2016, Singapore.

5. Polysilicon emitters for bipolar transistors: a review and re-evaluation of theory and experiment;Post;IEEE Trans. Electron Dev.,1992

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