Transient annealing for the production of n+ contact layers in GaAs

Author:

Gwilliam Russell,Bensalem Rachid,Sealy Brian,Stephens Kenneth

Publisher

Elsevier BV

Subject

General Engineering

Reference10 articles.

1. Proc. IBMM;Eisen,1978

2. Transient annealing of ion implanted GaAs

3. Laser-Solid Interactions and Transient Thermal Processing,1983

4. Beam annealing of semiconductor materials

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