Einfluß des totvolumens auf die Al2O3-CVD-Abscheidung

Author:

Peng J.,Danzinger M.,Lux B.

Publisher

Elsevier BV

Subject

General Medicine

Reference10 articles.

1. 5th Euro CVD Conf.;Lindström,1985

2. Dissertation;Peng,1987

3. 8th Int. Conf. on Vacuum Metallurgy;Colombier,1985

4. Kinetics of the Water—Gas Equilibrium Reaction. I. The Reaction of Carbon Dioxide with Hydrogen

5. Diffusional Mass Transfer;Skelland,1974

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4. Influence of Al-acetylacetonate addition on the CVD deposition of Al2O3 (reaction gas: AlCl3/CO2/H2);International Journal of Refractory Metals and Hard Materials;1996-01

5. Preparation of Al2O3 coatings by pyrolysis of Al-acetylacetonate in Ar-atmosphere;International Journal of Refractory Metals and Hard Materials;1996-01

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