Influence of Al-acetylacetonate addition on the CVD deposition of Al2O3 (reaction gas: AlCl3/CO2/H2)-Reference-Cited by-同舟云学术

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Influence of Al-acetylacetonate addition on the CVD deposition of Al2O3 (reaction gas: AlCl3/CO2/H2)

Published:1996-01 Issue:1-3 Volume:14 Page:69-77
ISSN:0263-4368
Container-title:International Journal of Refractory Metals and Hard Materials
language:en
Short-container-title:International Journal of Refractory Metals and Hard Materials

Author:

Danzinger M.,Haubner R.,Lux B.

Publisher

Elsevier BV

Subject

General Medicine

Reference20 articles.

1. Coating of Cemented Carbide Cutting Tools with Alumina by Chemical Vapor Deposition

2. Einfluß des totvolumens auf die Al2O3-CVD-Abscheidung

3. Proc. Euro CVD 4th;Park,1976

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Novel High-Performance CVD Coatings for Machining Applications;Powder Metallurgy Progress;2018-11-01

2. The history of hard CVD coatings for tool applications at the University of Technology Vienna;International Journal of Refractory Metals and Hard Materials;2013-11

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