Nano-positioning of an electromagnetic scanner with a MEMS capacitive sensor

Author:

Huang Xinghui,Lee Ju-Il,Ramakrishnan Narayanan,Bedillion Mark,Chu Patrick

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference9 articles.

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2. Sebastian A, Pantazi A, Cherubini G, Eleftheriou E, Lantz MA, Pozidis H. Nano-positioning for probe storage. In: Proceedings of American control conference, vol. 5, 2005, p. 4181–6.

3. Robust control toolbox v3;Balas,2007

4. Young PM, Morris JC, Ho HT. μ-Synthesis control with PI augmentation. In: Proceedings of American control conference, 2006, p. 1297–302.

5. Zero-phase error tracking algorithm for digital control;Tomizuka;ASME J Dyn Syst Measure Control,1987

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