A robust design of time-varying internal model principle-based control for ultra-precision tracking in a direct-drive servo stage
Author:
Funder
State Key Laboratory of Tribology
National Natural Science Foundation of China
Publisher
Elsevier BV
Reference35 articles.
1. High-performance control of fast tool servos with robust disturbance observer and modified H∞ control;Huang;Mechatronics,2022
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3. Closed-loop range-based control of dual-stage nanopositioning systems;Mitrovic;IEEE/ASME Trans Mechatronics,2021
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