Investigation of strain distribution in LOCOS structures by dynamical simulation of LACBED patterns

Author:

Wu Feng,Armigliato Aldo,Balboni Roberto,Frabboni Stefano

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. J. Vanhellemont, Ph.D. Thesis, University of Antwerp, 1990.

2. Micro‐Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy

3. Stress‐related problems in silicon technology

4. P. Smeys, P.B. Griffin, Z.U. Rek, I. De Wolf, K.C. Saraswat, Proceedings of IEDM 96, San Francisco, 1996, p. 709.

5. Higher order Laue zone effects in electron diffraction and their use in lattice parameter determination

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Strain field reconstruction in shallow trench isolation structures by CBED and LACBED;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-12

2. Stress fields near interfaces of aluminium-based metal-matrix composites;PHILOS MAG A;2002

3. Stress fields near interfaces of aluminium-based metal-matrix composites;Philosophical Magazine A;2002-07

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