Author:
Tsai Wen-Tien,Chen Horng-Ping,Hsien Wu-Yuan
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Energy Engineering and Power Technology,Safety, Risk, Reliability and Quality,General Chemical Engineering,Food Science,Control and Systems Engineering
Reference86 articles.
1. An analysis of fluorinated compound emissions reduction technologies and emission reduction goals;Beu;Electrochemical Society Proceedings,1999
2. Catalytic destruction of PFC emission from semiconductor fabrication tools;Bhatnagar;Electrochemical Society Proceedings,1999
3. Gases and gas equipment;Brookman,1998
4. An atmospheric-pressure plasma process for C2F6 removal;Chang;Environmental Science & Technology,2001
5. A carbon arc process for treatment of CF4 emissions;Chen;Environmental Science & Technology,1998
Cited by
204 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献