Characteristics of carbon incorporated BN films deposited by radio frequency PACVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Atomic arrangement and electronic structure ofBC2N
2. Anomalous band-gap behavior and phase stability ofc-BN–diamond alloys
3. Bonding characterization of BC2N thin films
4. B/C/N Materials Based on the Graphite Network
5. Pyrolytic Deposition of Carbon Films Containing Nitrogen and/or Boron
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