Plasma-based low-energy ion implantation for low-temperature surface engineering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference31 articles.
1. Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes
2. Plasma immersion ion implantation using plasmas generated by radio frequency techniques
3. Plasma source ion‐implantation technique for surface modification of materials
4. Plasma immersion ion implantation of steels
5. Phase transformations of a nitrogen-implanted austenitic stainless steel (X10 CrNiTi 18-9)
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