Width, structure and stability of sheaths in metal plasma immersion ion implantation and deposition: measurements and analytical considerations
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference25 articles.
1. Numerical simulation of plasma sheath expansion, with applications to plasma‐source ion implantation
2. Model of plasma immersion ion implantation
3. Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation
4. Displacement current and multiple pulse effects in plasma source ion implantation
5. Novel metal ion surface modification technique
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2. Macroparticle Reflection from a Biased Substrtate in Plasma Ion Implantation Systems;East European Journal of Physics;2020
3. Influence of supersonic ions and nonlocal electron kinetics on the sheath voltage in an expanding plasma;Plasma Sources Science and Technology;2015-02-06
4. Plasma immersion ion implantation characteristics with q-nonextensive electron velocity distribution;Journal of Plasma Physics;2015-01-20
5. Ion implanters;Ion Beam Treatment of Polymers;2015
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