Synthesis of plasma-polymerized hexamethyldisiloxane (HMDSO) films by microwave discharge
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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1. Plasmagestützte Verfahren der Oberflächentechnik;Benz,1989
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