Plasma-polymerised organosiloxane thin films as selective gas sensors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Plasma Organosilicon Polymers: Deposition, Characterization, and Application in Multilayer Resist
2. Corrosion protection by plasma-polymerized coatings
3. Characterization of plasma-deposited organosilicon thin films
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