Properties of various large-scale fabricated TiAlN- and CrN-based superlattice coatings grown by combined cathodic arc–unbalanced magnetron sputter deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Growth of single‐crystal TiN/VN strained‐layer superlattices with extremely high mechanical hardness
2. Deposition and properties of polycrystalline TiN/NbN superlattice coatings
3. Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatings
4. Multilayered titanium tungsten nitride coatings with a superlattice structure grown by unbalanced magnetron sputtering
5. Mechanical and tribological properties of multilayered PVD TiN/CrN, TiN/MoN, TiN/NbN and TiN/TaN coatings on cemented carbide
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