Wear-resistant amorphous SiC coatings produced by plasma-enhanced CVD-Reference-Cited by-同舟云学术

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Wear-resistant amorphous SiC coatings produced by plasma-enhanced CVD

Published:1999-09 Issue: Volume:116-119 Page:1024-1028
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Blum T.,Dresler B.,Kaßner St.,Hoffmann M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. Properties and device applications of hydrogenated amorphous silicon carbide films

2. Dünnschichttechnologie;Frey,1987

3. Amorphous and Crystalline Silicon Carbide and Related Materials;Harris,1987

4. Friction and wear behaviour of amorphous hydrogenated Si1−x Cx films

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3. The effects of adding nano‐alumina filler on the properties of polymer‐derived SiC coating;International Journal of Applied Ceramic Technology;2021-07-17

4. Laser annealing of sputter-deposited a-SiC and a-SiC x N y films;Bulletin of Materials Science;2011-12

5. Dependence of chemical composition and bonding of amorphous SiC on deposition temperature and the choice of substrate;Journal of Non-Crystalline Solids;2011-02

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