Characteristic of a dielectric barrier discharges using capillary dielectric and its application to photoresist etching-Reference-Cited by-同舟云学术

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Characteristic of a dielectric barrier discharges using capillary dielectric and its application to photoresist etching

Published:2003-01 Issue: Volume:163-164 Page:723-727
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Yi Chang-heon,Lee Yong-hyuk,Woo Kim Dong,Yeom Geun-young

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. The mechanism of the stabilisation of glow plasma at atmospheric pressure

2. The improvement of the atmospheric-pressure glow plasma method and the deposition of organic films

3. Appearance of stable glow discharge in air, argon, oxygen and nitrogen at atmospheric pressure using a 50 Hz source

4. Atmospheric pressure plasma processing with microstructure electrodes and microplanar reactors

5. Polymer deposition using atmospheric pressure plasma glow (APG) discharge

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A review on application of dielectric barrier discharge plasma technology on the abatement of volatile organic compounds;Frontiers of Environmental Science & Engineering;2019-04

2. Atmospheric plasma etching of polymers: A palette of applications in cleaning/ashing, pattern formation, nanotexturing and superhydrophobic surface fabrication;Microelectronic Engineering;2018-07

3. Plasma methods for metals recovery from metal–containing waste;Waste Management;2018-07

4. Photolytic Characteristics of TiO2 Treated by Atmospheric Pressure Dielectric Barrier Discharge;Korean Journal of Materials Research;2016-08-31

5. Non-Thermal Plasmas for VOCs Abatement;Plasma Chemistry and Plasma Processing;2014-06-21

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