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The effect of dense compression plasma flow on silicon surface morphology

  • Published:2002-09 Issue: Volume:158-159 Page:273-276
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Uglov V.V,Anishchik V.M,Astashynski V.V,Astashynski V.M,Ananin S.I,Askerko V.V,Kostyukevich E.A,Kuz'mitski A.M,Kvasov N.T,Danilyuk A.L

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference12 articles.

1. A.I. Morozov. Nucl. Fusion. Special Suppl. (1969) 111.

2. Choice of operating conditions and plasma parameters of a magnetoplasma compressor

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