Growth of MoxN films via chemical vapor deposition of MoCl5 and NH3
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference13 articles.
1. Catalytic hydrotreating of indole, benzothiophene, and benzofuran over Mo2N
2. Hydrodenitrogenation of Quinoline over High-Surface-Area Mo2N
3. Catalytic behavior of selected transition metal carbides, nitrides, and borides in the hydrodenitrogenation of quinoline
4. Structure and properties of reactivity sputtered γ-Mo2N hard coatings
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1. Synthesis, Characterization, and Single-Crystal X-ray Structures of Refractory Metal Compounds as Precursors for the Single-Source Chemical Vapor Deposition of Metal Nitrides;Inorganic Chemistry;2023-12-08
2. Effect of peak current on the microstructure, mechanical properties and tribological behavior of MoxN coatings deposited by high power impulse magnetron sputtering;Tribology International;2023-11
3. Synthesis and Volatility Characterization of Mo(II) and W(II) Compounds for Thin Films;Inorganic Chemistry;2023-10-03
4. Microstructure and Mechanical Properties of Co-Sputtering (Mo, Hf)N Coatings;Coatings;2022-04-09
5. Mechanical properties and tribological behaviour of Mo-N coatings deposited via high power impulse magnetron sputtering on temperature sensitive substrates;Tribology International;2018-03
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