Deposition and characterization of TiAlN and multi-layered TiN/TiAlN coatings using unbalanced magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference8 articles.
1. Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering
2. Study on d.c. magnetron sputter deposition of titanium aluminium nitride thin films: effect of aluminium content on coating
3. Oxidation resistance of hard wear resistant Ti0,5Al0,5N coatings grown by magnetron sputter deposition
4. State of the art for the industrial use of ceramic PVD coatings
5. Process and advantage of multicomponent and multilayer PVD coatings
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