Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference16 articles.
1. Oxidation kinetics of TiN thin films
2. On structure and properties of sputtered Ti and Al based hard compound films
3. Titanium aluminum nitride films: A new alternative to TiN coatings
4. Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating method
5. High-temperature oxidation of ion-plated TiN and TiAlN films
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