Ion beam assisted deposition of AlN monolithic films and Al/AlN multilayers: a comparative study-Reference-Cited by-同舟云学术

Ion beam assisted deposition of AlN monolithic films and Al/AlN multilayers: a comparative study

Published:1998-05 Issue: Volume:103-104 Page:334-339
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Wang X.,Kolitsch A.,Prokert F.,Möller W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference11 articles.

1. M.L.W. Klingenberg, J.K. Hirvonen, B.D. Sartwell, Internal Report: Ion Beam Processing for Environmentally Acceptable Coatings. National Defence Center for Environmental Excellence, 1997.

2. Nonmetallic crystals with high thermal conductivity

3. Characteristics of AlN Thin Films Deposited by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering and Their Application to GHz-Band Surface Acoustic Wave Devices

4. Synthesis of compound thin films by dual ion beam deposition. II. Properties of aluminum‐nitrogen films

5. Effect of ion beam energy on the synthesis of oriented aluminium nitride thin films

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