The IR multiphoton decomposition of PH3SiH4 mixtures sensitized by SiF4
Author:
Publisher
Elsevier BV
Subject
General Physics and Astronomy,General Chemical Engineering,General Chemistry
Reference42 articles.
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1. Dependence of the absorption of pulsed CO2‐laser radiation by silane on wavenumber, fluence, pulse duration, temperature, optical path length, and pressure of absorbing and nonabsorbing gases;Journal of Applied Physics;1995-05-15
2. Phosphorus and Hydrogen;P Phosphorus;1993
3. Dynamics of the SiF4-sensitized decomposition of PH3 by a pulsed CO2 tea laser;Journal of Photochemistry and Photobiology A: Chemistry;1990-06
4. Tetrafluorosilane-sensitized decomposition of germane by a pulsed carbon dioxide TEA laser;The Journal of Physical Chemistry;1989-11
5. SILICONE POLYMER DEPOSITION BY CO2-LASER INDUCED DECOMPOSITION OF SILANE IN THE PRESENCE OF METHYL-METHACRYLATE;APPL PHYS A-MATER;1988
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